Title :
Piezoresistive SU-8 Cantilever With Fe(III)Porphyrin Coating for CO Sensing
Author :
Reddy, C. Vijaya Bhaskar ; Khaderbad, Mrunal A. ; Gandhi, Sahir ; Kandpal, Manoj ; Patil, Sheetal ; Chetty, K. Narasaiah ; Rajulu, K. Govinda ; Chary, P.C.K. ; Ravikanth, M. ; Rao, V. Ramgopal
Author_Institution :
Dept. of Mech. Eng., Srikalahasteeswara Inst. of Technol., Srikalahasthi, India
fDate :
7/1/2012 12:00:00 AM
Abstract :
Carbon monoxide detection is required for various healthcare, environmental, and engineering applications. In this paper, 5,10,15,20-tetra (4,5-dimethoxyphenyl)-21H,23-Hporphyrin iron(III) chloride (Fe(III)porphyrin) coated on a piezoresistive SU-8 microcantilever has been used as a CO sensor. Rapid detection of CO down to 2 ppm has been observed with aforementioned sensors. Cantilevers without Fe(III)porphyrin have not responded to CO exposure. Fe(III)porphyrin-coated cantilever selectivity toward CO has been analyzed by measuring the sensor response to various gases such as N2, CO2, O2, ethanolamine, N2O, and moisture. The sensor has exhibited a fast response and recovery times and is fully recoverable after repeated exposures.
Keywords :
cantilevers; coatings; gas sensors; iron compounds; microsensors; organometallic compounds; piezoresistance; piezoresistive devices; 5,10,15,20-tetra (4,5-dimethoxyphenyl)-21H,23-H-porphyrin iron(III) chloride; Fe(III)porphyrin coating; Fe(III)porphyrin-coated cantilever selectivity; carbon monoxide exposure; carbon monoxide sensing; carbon monoxide sensor; engineering application; environmental application; ethanolamine; healthcare application; moisture; piezoresistive SU-8 microcantilever; rapid carbon monoxide detection; recovery time; response time; sensor response; Carbon; Gold; Piezoresistance; Polymers; Sensitivity; Sensors; Cantilevers; carbon monoxide; iron porphyrin; piezoresistance; sensor;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2012.2190619
