Title :
Parameter extraction of resistive thermal microsensors by AC electrical method
Author :
Ou-Yang, Mang ; Sheen, Chin-Shown ; Shie, Jin-Shown
Author_Institution :
Precision Instrum. Dev. Center, Nat. Sci. Council, Taiwan
fDate :
4/1/1998 12:00:00 AM
Abstract :
Obtaining device parameters of thermal microsensors is essential for evaluating their performances and simulation modeling. We report an AC electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficient of resistance, thermal capacitance, and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results are compared with other methods
Keywords :
bolometers; electric resistance measurement; harmonic generation; microsensors; temperature measurement; temperature sensors; thermistors; AC electrical method; device parameters; electrothermal effect; microbolometer; output voltage; parameter extraction; performance evaluation; resistive thermal microsensors; second harmonic signal; simulation modeling; sinusoidal driving current; temperature coefficient of resistance; thermal capacitance; thermal conductance; Capacitance; Electric resistance; Instruments; Microsensors; Parameter extraction; Performance evaluation; Temperature; Thermal conductivity; Thermal resistance; Voltage;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
