Parameter extraction of resistive thermal microsensors by AC electrical method

Author

Ou-Yang, Mang ; Sheen, Chin-Shown ; Shie, Jin-Shown

Author_Institution

Precision Instrum. Dev. Center, Nat. Sci. Council, Taiwan

Volume

47

Issue

2

fYear

1998

fDate

4/1/1998 12:00:00 AM

Firstpage

403

Lastpage

408

Abstract

Obtaining device parameters of thermal microsensors is essential for evaluating their performances and simulation modeling. We report an AC electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficient of resistance, thermal capacitance, and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results are compared with other methods

Keywords

bolometers; electric resistance measurement; harmonic generation; microsensors; temperature measurement; temperature sensors; thermistors; AC electrical method; device parameters; electrothermal effect; microbolometer; output voltage; parameter extraction; performance evaluation; resistive thermal microsensors; second harmonic signal; simulation modeling; sinusoidal driving current; temperature coefficient of resistance; thermal capacitance; thermal conductance; Capacitance; Electric resistance; Instruments; Microsensors; Parameter extraction; Performance evaluation; Temperature; Thermal conductivity; Thermal resistance; Voltage;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.744182

Filename

744182