Electrooptical measurement system for the DC characterization of visible detectors for CMOS-compatible vision chips

Author

Roca, Elisenda ; Frutos, Fabian ; Espejo, Servando ; Dominguez-Castro, Rafael ; Rodnguez-Vgzquez, A.

Author_Institution

Centro Nacional de Microelectron., Inst. de Microelectron. de Sevilla, Spain

Volume

47

Issue

2

fYear

1998

fDate

4/1/1998 12:00:00 AM

Firstpage

499

Lastpage

506

Abstract

An electrooptical measurement system for the dc characterization of visible detectors for CMOS-compatible vision chips is presented, which can help designers to characterize these detectors. The measurement system has been designed to be versatile, fast, and easily expandable and used. Two different setups for the measurement of the spectral response and the optical dynamic range of the detectors are described in detail. Measurements of the spectral response are done with a fully computer-controlled setup, avoiding tedious and inaccurate measurements. A description of the different detectors available in a CMOS process is also given, together with the parameters affecting their response and a set of test structures which can be useful for the characterization of the detectors

Keywords

CMOS image sensors; computer vision; electro-optical effects; photodetectors; CMOS imager; DC characteristics; computer-controlled system; electrooptical measurement; optical dynamic range; spectral response; visible detector; vision chip; CMOS process; CMOS technology; Detectors; Integrated circuit measurements; Optical arrays; Optical sensors; Optical signal processing; Photodetectors; Semiconductor device measurement; Sensor arrays;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.744198

Filename

744198