DocumentCode
1470777
Title
Ion beam measurement with a high-temperature superconductor SQUID and current comparator
Author
Hao, Ling ; Macfarlane, John C. ; Gallop, John C.
Author_Institution
Nat. Phys. Lab., Teddington, UK
Volume
50
Issue
2
fYear
2001
fDate
4/1/2001 12:00:00 AM
Firstpage
302
Lastpage
305
Abstract
A noninvasive and potentially absolute method is described for the real-time measurement of ion or electron beams in the range 1 μA-10 mA. The principle of the superconducting current comparator, which is well established in liquid-helium-temperature applications, is realized with high-temperature superconductor (HTS) components, and shown to be capable of sufficient sensitivity and accuracy for the proposed application. Particular attention is paid to the optimization of coupling between the current comparator and the HTS SQUID detector. The advantages to be gained by suitable patterning of the outer superconducting coating to achieve gradiometric detection are described. No serious problems were encountered during trial operation of the SQUID with an argon-ion magnetron plasma source
Keywords
SQUIDs; current comparators; electron beams; high-temperature superconductors; ion beams; process monitoring; sensitivity; 1 muA to 10 mA; accuracy; current comparator; electron beams; gradiometric detection; high-temperature superconductor SQUID; ion beam measurement; magnetron plasma source; outer superconducting coating; sensitivity; Current measurement; Detectors; Electron beams; High temperature superconductors; Ion beams; Magnetic field measurement; Particle beam measurements; Particle beams; SQUIDs; Superconducting materials;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/19.918127
Filename
918127
Link To Document