• DocumentCode
    1470924
  • Title

    Development of a six-component miniature force sensor using silicon micromachining and conventional machining technologies [for microrobotics application]

  • Author

    Jin, W.L. ; Mote, C.D., Jr.

  • Author_Institution
    California Univ., Berkeley, CA, USA
  • Volume
    47
  • Issue
    3
  • fYear
    1998
  • fDate
    6/1/1998 12:00:00 AM
  • Firstpage
    715
  • Lastpage
    719
  • Abstract
    A six-component miniature force sensor (5×5×5 mm3 ) is developed using microfabrication and conventional precision machining technologies. High sensitivity and high stiffness are obtained simultaneously with a novel silicon sensing element design. Fair agreement between predicted and measured sensitivities is obtained
  • Keywords
    diaphragms; force sensors; micromachining; microrobots; microsensors; silicon; strain gauges; 3D structure; 5 mm; Si; conventional machining; high sensitivity; high stiffness; microfabrication; microrobotics application; multicomponent force sensor; precision machining; sensing element design; silicon micromachining; six-component miniature force sensor; stiffness; strain gauge; Bonding; Capacitive sensors; Deformable models; Etching; Force sensors; Machining; Micromachining; Robot sensing systems; Silicon; Strain measurement;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/19.744335
  • Filename
    744335
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1470924