DocumentCode
1471332
Title
Density comparison measurement of silicon by pressure of flotation method
Author
Waseda, Atsushi ; Fujii, K.
Author_Institution
Nat. Res. Lab. of Metrol., Ibaraki, Japan
Volume
50
Issue
2
fYear
2001
fDate
4/1/2001 12:00:00 AM
Firstpage
604
Lastpage
607
Abstract
We have developed a new density comparison measurement system for silicon crystals using the pressure of flotation method to evaluate the consistency in the absolute densities and to study defect and impurity effects on silicon single crystals. We have carried out density comparison measurements for the density standard and Avogadro constant silicon spheres of the NRLM, Ibaraki, Japan. We have calculated the adjusted densities from our comparison and absolute measurements based on a least-squares analysis using a matrix formulation
Keywords
constants; density measurement; measurement standards; silicon; Avogadro constant silicon spheres; Si; absolute densities; density comparison measurement system; density effects; density standard; impurity effects; least-squares analysis; matrix formulation; molar volume; pressure of flotation method; silicon single crystals; Crystals; Density measurement; Impurities; Laboratories; Metrology; Pressure control; Pressure measurement; Silicon; Solids; Temperature;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/19.918202
Filename
918202
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