Title :
Micromachined polysilicon microscanners for barcode readers
Author :
Meng-Hsiung Kiang ; Solgaard, O. ; Muller, R.S. ; Lau, K.Y.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
We describe the design and fabrication of micromachined resonant scanners that have large scan angles at fast scan speeds. Driven by an electrostatic combdrive actuator, these 200 μm×250 μm micromirrors have a maximum scan angle of 28/spl deg/ (optical) at a resonant frequency of 3 kHz when driven by a sinusoidal voltage of 9.5 V (amplitude) superimposed on a 30-V dc bias. Fabricated with a four-layer polysilicon-surface-micromachining process, these resonant scanners are compact, extremely light in weight, potentially very low in cost, and operate at very low power levels. Using the scanner as a laser-beam deflector, we have demonstrated a barcode reader system.
Keywords :
bar codes; electro-optical deflectors; laser beams; laser mirrors; mark scanning equipment; micromachining; optical design techniques; optical fabrication; optical scanners; silicon; /spl mu/m micromirrors; 200 mum; 250 mum; 3 kHz; 30 V; 9.5 V; Si; barcode reader system; barcode readers; compact; dc bias; electrostatic combdrive actuator; extremely light; fast scan speeds; four-layer polysilicon-surface-micromachining process; large scan angles; laser-beam deflector; low cost; low power levels; maximum scan angle; micromachined polysilicon microscanners; micromachined resonant scanner design; micromachined resonant scanner fabrication; resonant frequency; resonant scanners; sinusoidal voltage; Biomedical optical imaging; Costs; Electrostatics; Integrated optics; Manufacturing industries; Micromirrors; Mirrors; Optical device fabrication; Resonance; Silicon;
Journal_Title :
Photonics Technology Letters, IEEE
