DocumentCode :
1471571
Title :
Comparative Analysis of MIS Capacitance Structures With High-k Dielectrics Under Gamma, ^{16} O and p Radiation
Author :
Quinteros, C.P. ; Salomone, L. Sambuco ; Redin, E. ; Rafí, J.M. ; Zabala, M. ; Faigón, A. ; Palumbo, F. ; Campabadal, F.
Author_Institution :
Consejo Nacional de Investigaciones Científicas y Técnicas (CONICET) and CNEA, San Martín (1650), Argentina
Volume :
59
Issue :
4
fYear :
2012
Firstpage :
767
Lastpage :
772
Abstract :
MIS capacitance structures, with Hafnium Oxide, Alumina and nanolaminate as dielectrics were studied under gamma photons ^{60}{\\hbox {Co}} , 25 MeV oxygen ions and 10 MeV protons radiation using capacitance-voltage (C-V) characterization.
Keywords :
Capacitance; Capacitance-voltage characteristics; Capacitors; Hafnium oxide; Hysteresis; Radiation effects; High-k gate dielectrics; MOS devices; radiation effects;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.2012.2187217
Filename :
6170909
Link To Document :
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