DocumentCode
1471785
Title
High-Sensitivity Inductive Pressure Sensor
Author
Bakhoum, Ezzat G. ; Cheng, Marvin H M
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of West Florida, Pensacola, FL, USA
Volume
60
Issue
8
fYear
2011
Firstpage
2960
Lastpage
2966
Abstract
A new type of pressure sensors with extremely high sensitivity is introduced. Unlike piezoresistive, capacitive, and linear-variable-differential-transformer-based pressure sensors, the new sensor is based on a technique for substantially changing the inductance of a coil. The prototype device has demonstrated a change in inductance of approximately 34.5 mH over a pressure range of 10 kPa. The sensor offers a number of desirable features, including linearity, low temperature, and pressure hysteresis, in addition to small size.
Keywords
coils; hysteresis; inductance; inductive sensors; pressure sensors; sensitivity; coil; inductance; inductive sensor; pressure hysteresis; pressure sensors; prototype device; sensitivity; temperature hysteresis; Coils; Hysteresis; Inductance; Iron; Pressure measurement; Sensitivity; Temperature sensors; Inductance-to-frequency converter; pressure hysteresis; pressure sensor; relative permeability; temperature hysteresis; variable inductance;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/TIM.2011.2118910
Filename
5730492
Link To Document