Title :
Low-loss and polarisation-insensitive interlayer coupler on three-dimensional SiOx-waveguide platform
Author :
Hiraki, Tatsurou ; Tsuchizawa, Tai ; Nishi, Hidetaka ; Yamamoto, Takayuki ; Yamada, Koji
Author_Institution :
NTT Nano Photonics Center, Kanagawa, Japan
Abstract :
A low-loss and polarisation-insensitive vertical directional coupler that connects vertically stacked SiOx waveguides is reported. The fabrication process features the low-temperature formation of an SiOx film to prevent thermal damage to the lower layer waveguides. Experimental results showed interlayer coupling losses of <;0.1 dB in both transverse-electric and transverse-magnetic modes.
Keywords :
arrayed waveguide gratings; directional couplers; integrated optics; silicon compounds; SiOx; interlayer coupling losses; low-loss polarisation-insensitive vertical directional coupler; thermal damage; three-dimensional silica-waveguide platform; transverse-electric modes; transverse-magnetic modes;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2014.3549
