Computer control of the manufacture of electron beam processed microelectronic modules

The characteristics of the electron-beam machine as a welding and cutting tool lend themselves to computer-controlled operation. The paper describes such a combination used to produce a specially-designed microelectronic package. The aim of the system design was to allow the package to be made precisely to the user´s requirements by merely reprogramming the computer. Electron-beam techniques are discussed in relation to the micromodule concept, the machine functions which need to be controlled and the other control elements required are described and the computer input-output and interface characteristics are discussed. Programming aspects are also described. Finally, reference is made to future developments that are thought desirable.