Title :
Design and control of a high precision electron beam machine
Author :
Vaucher, J.G. ; Gourley, S.F. ; Hardy, C.J. ; Hoffman, G.R.
fDate :
5/20/1905 12:00:00 AM
Abstract :
A two-lens electron beam machine is designed to give maximum power density in spot diameters ranging from 1.5 ¿m to 10 ¿m. The beam is deflected in a raster and modulated by a simple pattern generator. The design and performance of the electron optical system and the present control equipment are discussed together with a proposal for an on-line computer control system
Keywords :
computer applications; electron beams; electron lenses; electron optics; manufacturing processes;
Journal_Title :
Radio and Electronic Engineer
DOI :
10.1049/ree.1967.0014
