Local microwave surface resistance variations of the YBaCuO thin films patterned by selective laser irradiation and plasma fluorination

Author

Feng, Y.J. ; Liu, L. ; Fu, Z.L. ; Wu, L.Y. ; Liu, Q.G. ; You, L.X. ; Kang, L. ; Yang, S.Z. ; Wu, P.H. ; Wang, S.Z.

Author_Institution

Dept. of Electron. Sci. & Eng., Nanjing Univ., China

Volume

11

Issue

1

fYear

2001

fDate

3/1/2001 12:00:00 AM

Firstpage

123

Lastpage

126

Abstract

In this paper, we have studied the planar patterning of the YBa ₂Cu₃O_7-δ thin films by laser irradiation and ion plasma treatment. The laser ablated YBa₂Cu₃O_7-δ thin films have been modified either by selective laser irradiation or by plasma fluorination in an atmosphere of CF₄ to pattern microwave devices. Transport measurements and microstructure analysis have been used to study the effects of the selective laser irradiation or plasma fluorination on the superconductivity of the YBa₂Cu₃O_7-δ thin films. A scanning microwave near-field microscopy has been involved to investigate the local microwave surface resistances of the patterned devices. Enhancement of the microwave surface resistance has been found in the treated regions of the YBa₂Cu₃O_7-δ thin films by selective laser irradiation or plasma fluorination. These results would be helpful in evaluating the microwave performance of the devices

Keywords

barium compounds; high-temperature superconductors; superconducting microwave devices; superconducting thin films; surface conductivity; surface topography; surface treatment; yttrium compounds; YBa₂Cu₃O_7-δ; YBa₂Cu₃O₇; YBaCuO thin films; high temperature superconductor; local microwave surface resistance variations; microstructure analysis; plasma fluorination; scanning microwave near-field microscopy; selective laser irradiation; Masers; Plasma devices; Plasma measurements; Plasma transport processes; Superconducting microwave devices; Superconducting thin films; Surface resistance; Surface treatment; Transistors; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.919300

Filename

919300