Title :
Local microwave surface resistance variations of the YBaCuO thin films patterned by selective laser irradiation and plasma fluorination
Author :
Feng, Y.J. ; Liu, L. ; Fu, Z.L. ; Wu, L.Y. ; Liu, Q.G. ; You, L.X. ; Kang, L. ; Yang, S.Z. ; Wu, P.H. ; Wang, S.Z.
Author_Institution :
Dept. of Electron. Sci. & Eng., Nanjing Univ., China
fDate :
3/1/2001 12:00:00 AM
Abstract :
In this paper, we have studied the planar patterning of the YBa 2Cu3O7-δ thin films by laser irradiation and ion plasma treatment. The laser ablated YBa2Cu3O7-δ thin films have been modified either by selective laser irradiation or by plasma fluorination in an atmosphere of CF4 to pattern microwave devices. Transport measurements and microstructure analysis have been used to study the effects of the selective laser irradiation or plasma fluorination on the superconductivity of the YBa2Cu3 O7-δ thin films. A scanning microwave near-field microscopy has been involved to investigate the local microwave surface resistances of the patterned devices. Enhancement of the microwave surface resistance has been found in the treated regions of the YBa2Cu3O7-δ thin films by selective laser irradiation or plasma fluorination. These results would be helpful in evaluating the microwave performance of the devices
Keywords :
barium compounds; high-temperature superconductors; superconducting microwave devices; superconducting thin films; surface conductivity; surface topography; surface treatment; yttrium compounds; YBa2Cu3O7-δ; YBa2Cu3O7; YBaCuO thin films; high temperature superconductor; local microwave surface resistance variations; microstructure analysis; plasma fluorination; scanning microwave near-field microscopy; selective laser irradiation; Masers; Plasma devices; Plasma measurements; Plasma transport processes; Superconducting microwave devices; Superconducting thin films; Surface resistance; Surface treatment; Transistors; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
