Title :
Carbon masks for patterning of YBa2Cu3Ox submicron Josephson junctions
Author :
Volkov, Ivan A. ; Kalabukhov, Alexey S. ; Snigirev, Oleg V. ; Zherikhin, Alexander N.
Author_Institution :
Dept. of Phys., Moscow State Univ., Russia
fDate :
3/1/2001 12:00:00 AM
Abstract :
We have developed a fabrication process for submicron wide YBa2Cu3Ox (YBCO) Josephson junctions on bicrystal substrates. The masks patterned in carbon films grown by laser ablation were used for ion beam etching of YBCO films. The carbon deposition parameters providing conservation of critical temperature of YBCO films covered by carbon layers have been found. The test 1.5 to 3 μm wide YBCO bridges have been fabricated on single crystal SrTiO3 substrates using the developed technology
Keywords :
Josephson effect; barium compounds; carbon; high-temperature superconductors; masks; pulsed laser deposition; sputter etching; superconducting thin films; superconducting transition temperature; yttrium compounds; C; SrTiO3 single crystal substrate; YBCO bridge; YBCO thin film; YBa2Cu3O; YBa2Cu3Ox submicron Josephson junction; bicrystal substrate; carbon mask; critical temperature; fabrication process; ion beam etching; laser ablation; Bridges; Etching; High temperature superconductors; Ion beams; Josephson junctions; Laser ablation; Optical device fabrication; Optical films; Substrates; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
