Superconducting half-wave microwave resonator on YSZ buffered Si (100)

We have produced high quality superconducting half-wave microwave resonators on YBCO/YSZ/Si heterostructures. The YSZ was grown on (100) Si by pulsed dc magnetron sputtering at 820°C in 37 mTorr Ar/O₂ . YBCO was then deposited on the YSZ/Si by pulsed laser ablation at 760°C in 0.5 Torr of O₂. A coplanar meander-line structure was patterned and its microwave characteristics measured. The results indicate Si to be a definite candidate for microwave applications producing Q values exceeding 50,000 at 4 GHz for T<30 K. The microwave properties compare favorably to those obtained from identical resonators patterned on normal metal and YBCO/LaAlO₃ at 30 K