Cathodic-arc plasma density, radial profile, and total plasma inventory as measured by microwave interferometer and Faraday cup

Author

Wood, Blake P. ; Pesenson, Dina

Author_Institution

Los Alamos Nat. Lab., NM, USA

Volume

26

Issue

6

fYear

1998

fDate

12/1/1998 12:00:00 AM

Firstpage

1718

Lastpage

1723

Abstract

The total amount of plasma, peak plasma density, and plasma density radial profile are derived from a series of measurements of ion current density (with a Faraday cup) and integrated electron line density (with a microwave interferometer) for a cathodic arc derived plasma. Comparisons are made between cathode material (erbium and titanium), arc current, background gas pressure, and the presence or absence of a series magnetic solenoid around the coaxial anode and cathode

Keywords

arcs (electric); electromagnetic wave interferometry; plasma density; plasma diagnostics; Er; Faraday cup; Ti; arc current; background gas pressure; cathodic arc derived plasma; cathodic-arc plasma density; coaxial anode; coaxial cathode; integrated electron line density; ion current density; magnetic solenoid; microwave interferometer; peak plasma density; plasma density radial profile; plasma inventory; radial profile; Cathodes; Current density; Current measurement; Density measurement; Electrons; Magnetic materials; Microwave measurements; Plasma density; Plasma materials processing; Plasma measurements;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.747891

Filename

747891