DocumentCode :
1476027
Title :
Cathodic-arc plasma density, radial profile, and total plasma inventory as measured by microwave interferometer and Faraday cup
Author :
Wood, Blake P. ; Pesenson, Dina
Author_Institution :
Los Alamos Nat. Lab., NM, USA
Volume :
26
Issue :
6
fYear :
1998
fDate :
12/1/1998 12:00:00 AM
Firstpage :
1718
Lastpage :
1723
Abstract :
The total amount of plasma, peak plasma density, and plasma density radial profile are derived from a series of measurements of ion current density (with a Faraday cup) and integrated electron line density (with a microwave interferometer) for a cathodic arc derived plasma. Comparisons are made between cathode material (erbium and titanium), arc current, background gas pressure, and the presence or absence of a series magnetic solenoid around the coaxial anode and cathode
Keywords :
arcs (electric); electromagnetic wave interferometry; plasma density; plasma diagnostics; Er; Faraday cup; Ti; arc current; background gas pressure; cathodic arc derived plasma; cathodic-arc plasma density; coaxial anode; coaxial cathode; integrated electron line density; ion current density; magnetic solenoid; microwave interferometer; peak plasma density; plasma density radial profile; plasma inventory; radial profile; Cathodes; Current density; Current measurement; Density measurement; Electrons; Magnetic materials; Microwave measurements; Plasma density; Plasma materials processing; Plasma measurements;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/27.747891
Filename :
747891
Link To Document :
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