Title :
Fabrication and experimentation of vertical spring-type micromirror using shielding screen structure
Author :
Lim, Tae-Sun ; Kim, Yong-Kweon
Author_Institution :
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
A vertical spring-type micromirror was fabricated using a shielding screen structure. Unlike the micromirror that was fabricated using only shadow evaporation, the fabricated vertical springs in this case are well defined, using both shadow evaporation and a shielding screen structure. The static and dynamic characteristics of micromirror are measured by means of contact-free optical measurement system. The downward threshold voltage is 16 V and the step response time is 16.8 μs. Images are projected onto a screen using a simple projection system with the fabricated micromirror array
Keywords :
micro-optics; mirrors; optical arrays; optical fabrication; optical projectors; screens (display); shielding; fabrication; image projection system; shadow evaporation; shielding screen; step response time; threshold voltage; vertical spring-type micromirror array; Etching; Fabrication; Fasteners; Large screen displays; Micromirrors; Mirrors; Plasma displays; Resists; Shape; Springs;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.748111
