• DocumentCode
    1477276
  • Title

    Positioning FBAR technology in the frequency and timing domain

  • Author

    Ruby, Rich ; Small, Martha ; Bi, Frank ; Lee, Don ; Callaghan, Lori ; Parker, Reed ; Ortiz, Steve

  • Author_Institution
    Wireless Semicond. Div., Avago Technol., San Jose, CA, USA
  • Volume
    59
  • Issue
    3
  • fYear
    2012
  • fDate
    3/1/2012 12:00:00 AM
  • Firstpage
    334
  • Lastpage
    345
  • Abstract
    This paper focuses on the technical differentiation of film bulk acoustic resonator (FBAR) technology from other mechanical resonator technologies for timing applications. The paper will touch on a recent modification of FBARs, the zero-drift resonator (ZDR), that is temperature compensated. One technology differentiator is the size of the chip-scale packaged resonator. Another is that the silicon lid is perfectly suitable for placement of integrated circuits and this is currently being done. Many factors (wide tuning range, high Q, high frequency, small size, integrated circuitry) are being used to differentiate potential products for the time and frequency markets.
  • Keywords
    acoustic resonators; bulk acoustic wave devices; ZDR; film bulk acoustic resonator; frequency domain; mechanical resonator; positioning FBAR technology; technical differentiation; timing domain; zero-drift resonator; Couplings; Crystals; Film bulk acoustic resonators; Frequency conversion; Frequency measurement; Oscillators; Resonant frequency;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/TUFFC.2012.2202
  • Filename
    6174178