DocumentCode :
147849
Title :
S3-P11: Thin-film coatings for improved thermal performances of GaN-based HEMTs
Author :
Aubry, Raphael ; Michel, N. ; Jacquet, J.C. ; Baczkowski, Leny ; Patard, O. ; Chartier, E. ; Lancereau, D. ; Bohbot, S. ; Di Forte Poisson, M.A. ; Oualli, M. ; Piotrowicz, S. ; Delage, S.L. ; Djouadi, A. ; Scudeller, Y. ; Ait-Aissa, K. ; Calus, J. ; Kohn,
Author_Institution :
III-V Lab., Alcatel-Thales, Marcoussis, France
fYear :
2014
fDate :
5-7 Aug. 2014
Firstpage :
1
Lastpage :
4
Abstract :
Thin-film coatings for improved performances of GaN-based HEMTs are investigated. AlN coatings are used either as primary or secondary passivation to reduce the thermal resistance of the transistors.
Keywords :
III-V semiconductors; aluminium compounds; coatings; gallium compounds; high electron mobility transistors; thin films; wide band gap semiconductors; AlN coatings; GaN-AlN; GaN-based HEMT; secondary passivation; thermal performances; thermal resistance; thin-film coatings; Coatings; HEMTs; III-V semiconductor materials; Logic gates; MODFETs; Passivation; Silicon compounds; AlN coatings; GaN; HEMTs; Thermal Management;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lester Eastman Conference on High Performance Devices (LEC), 2014
Conference_Location :
Ithaca, NY
Type :
conf
DOI :
10.1109/LEC.2014.6951566
Filename :
6951566
Link To Document :
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