Some peculiarities of pulsed laser deposition of large area thin films

Author

Kuzanyan, Armen S. ; Badalyan, Georgi R. ; Nikoghosyan, Vahan R. ; Harutyunyan, Sergey R.

Author_Institution

Inst. of Phys. Res., Acad. of Sci., Ashtarak, Armenia

Volume

11

Issue

1

fYear

2001

fDate

3/1/2001 12:00:00 AM

Firstpage

3859

Lastpage

3862

Abstract

The fabrication of large area Y-Ba-Cu-O thin films by pulsed laser deposition is discussed. The influence of laser spot dimension, laser fluence and the target topography on the plasma plume angular distribution has been investigated. A film-based method was used for determining angular distribution. The primary factors affecting the form of the plume have been determined. The spatial distribution of laser-generated particulates has also been investigated. A simple method to obtain large area thin films by deposition through a mask has been examined for reducing the number of particulates

Keywords

barium compounds; high-temperature superconductors; plasma production by laser; pulsed laser deposition; superconducting thin films; yttrium compounds; YBaCuO; angular distribution; large area thin films; laser fluence; laser spot dimension; laser-generated particulates; plasma plume angular distribution; pulsed laser deposition; target topography; Geometrical optics; Laser theory; Optical films; Optical materials; Optical pulses; Pulsed laser deposition; Sputtering; Substrates; Superconducting materials; Surfaces;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.919907

Filename

919907