Title :
Development and Application of a Novel Microfabricated Device for the In Situ Tensile Testing of 1-D Nanomaterials
Author :
Ganesan, Yogeeswaran ; Lu, Yang ; Peng, Cheng ; Lu, Hao ; Ballarini, Roberto ; Lou, Jun
Author_Institution :
Dept. of Mech. Eng. & Mater. Sci., Rice Univ., Houston, TX, USA
fDate :
6/1/2010 12:00:00 AM
Abstract :
We report on the development and application of a silicon microdevice for the in situ quantitative mechanical characterization of single 1-D nanomaterials within a scanning electron microscope equipped with a quantitative nanoindenter. The design makes it possible to convert a compressive nanoindentation force applied to a shuttle to uniaxial tension on a specimen attached to a sample stage. Finite-element analysis and experimental calibration have been employed to extract the specimen stress versus strain curve from the indentation load versus displacement curve. The stress versus strain curves for three 200-300-nm-diameter Ni nanowire specimens are presented and analyzed.
Keywords :
Young\´s modulus; elemental semiconductors; finite element analysis; micromechanical devices; nanoindentation; nanowires; nickel; scanning electron microscopy; silicon; stress-strain relations; tensile strength; tensile testing; 1D nanomaterials; Ni; Ni nanowire; Si; compressive nanoindentation force; experimental calibration; finite-element analysis; in situ quantitative mechanical characterization; in situ tensile testing; scanning electron microscopy; silicon microdevice; size 200 nm to 300 nm; stress versus strain curve; uniaxial tension; In situ; microdevices; nanoindenter; nanomanipulation; nanomechanics;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2010.2046014
