• DocumentCode
    1479901
  • Title

    Electron beam techniques for magnetic bubble device fabrication

  • Author

    Harris, R.A. ; Clegg, W.W. ; Pickard, R.M. ; Gourley, S.F. ; Hardy, C.J.

  • Author_Institution
    University of Manchester, Manchester, UK
  • Volume
    43
  • Issue
    7
  • fYear
    1973
  • fDate
    7/1/1973 12:00:00 AM
  • Firstpage
    430
  • Lastpage
    434
  • Abstract
    By using the electron beam machine to expose an electron sensitive resist and then by use of the ´float-off technique it is possible to produce the necessary permalloy overlay patterns for bubble devices with micron linewidths. Specification of the pattern is by computer program. At higher powers, the electron beam can also be used to damage the bubble material. This damage can be used to constrain the bubble motion.
  • fLanguage
    English
  • Journal_Title
    Radio and Electronic Engineer
  • Publisher
    iet
  • ISSN
    0033-7722
  • Type

    jour

  • DOI
    10.1049/ree.1973.0067
  • Filename
    5268670
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1479901