Title :
Selective Thin-Film Deposition for Optofluidic Platforms With Optimized Transmission
Author :
Phillips, Brian S. ; Jenkins, Micah H. ; Liu, Shuo ; Schmidt, Holger ; Hawkins, Aaron R.
Author_Institution :
Dept. of Electr. & Comput. Eng., Brigham Young Univ., Provo, UT, USA
fDate :
6/1/2011 12:00:00 AM
Abstract :
Selective deposition of dielectric thin films on an optofluidic biosensor provides the means for low loss in hollow-core waveguides and increased solid- to hollow-core coupling. Polymethylglutarimide (PMGI) is used over nonplanar topographies to provide liftoff patterning of dielectric films deposited at temperatures up to 250°C . This fabrication method provides throughput improvement in devices with hollow-cores longer than 2 mm.
Keywords :
biosensors; integrated optics; light transmission; lithography; micro-optics; microfluidics; optical fabrication; optical polymers; optical waveguides; PMGI; dielectric thin film deposition; fabrication method; hollow core waveguide; liftoff patterning; nonplanar topography; optimized transmission; optofluidic biosensor; optofluidic platform; polymethylglutarimide; selective thin film deposition; solid-to-hollow core coupling; Fabrication; Films; Optical waveguides; Propagation losses; Resists; System-on-a-chip; Fabrication; optical waveguides; thin films;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2011.2132125
