Title :
Torque evaluation of a LIGA fabricated electrostatic micromotor
Author :
Samper, V.D. ; Sangster, A.J. ; Reuben, R.L. ; Wallrabe, U.
Author_Institution :
Inst. of Microelectron., Singapore
fDate :
3/1/1999 12:00:00 AM
Abstract :
The dynamic analysis of a twin stator electrostatic wobble motor is presented incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual devices is then examined and a solution is described which allows the evaluation of torques smaller than 10-7 Nm without affecting the wobble motion of the device. Theoretical and practical results for actual devices are compared
Keywords :
LIGA; electrostatic motors; finite element analysis; machine theory; rolling friction; sliding friction; torque; LIGA fabrication; dynamic model; electric field; electrostatic micromotor; finite element analysis; rolling friction; sliding friction; torque; wobble motor; Contact resistance; Electrostatic analysis; Finite element methods; Friction; Impedance; Micromotors; Rotors; Shafts; Stators; Torque measurement;
Journal_Title :
Microelectromechanical Systems, Journal of
