• DocumentCode
    1481502
  • Title

    Vibration characteristics of besocke-style scanning systems

  • Author

    Zhang, Hui ; Zhang, Shu-yi ; Chen, Zhao-Jiang ; Fan, Li

  • Author_Institution
    Lab. of Modern Acoust., Nanjing Univ., Nanjing, China
  • Volume
    57
  • Issue
    5
  • fYear
    2010
  • fDate
    5/1/2010 12:00:00 AM
  • Firstpage
    1140
  • Lastpage
    1145
  • Abstract
    A vibration model of Besocke-style scanners is given based on Timoshenko beam theory. The model is applied to investigate the flexural vibration characteristics of piezotubes in the scanners, in which the effects of affiliated components of the piezo-tubes are considered. The calculated results show that several factors in addition to the piezo-tubes themselves influence the flexural vibration frequencies of the scanners. An example is the balls which support the piezo-tubes. These play important roles in influencing the flexural vibration characteristics of the scanners and can result in high-flexural resonance frequencies. The local resonance of the scanner disk can also influence the flexural vibration characteristics of the piezo-tubes. Finally, we show that the effects of the local resonance on the vibration characteristics of the scanners can be decreased or eliminated by improving the rigidity of connection between the scanner disk and the piezo-tube.
  • Keywords
    piezoelectric devices; scanning probe microscopy; shear modulus; vibrations; Besocke-style scanners; Besocke-style scanning systems; Timoshenko beam theory; flexural vibration characteristics; flexural vibration frequencies; high-flexural resonance frequencies; piezotubes; rigidity; vibration model; Resonance; Resonant frequency;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/TUFFC.2010.1525
  • Filename
    5456262