DocumentCode
1481502
Title
Vibration characteristics of besocke-style scanning systems
Author
Zhang, Hui ; Zhang, Shu-yi ; Chen, Zhao-Jiang ; Fan, Li
Author_Institution
Lab. of Modern Acoust., Nanjing Univ., Nanjing, China
Volume
57
Issue
5
fYear
2010
fDate
5/1/2010 12:00:00 AM
Firstpage
1140
Lastpage
1145
Abstract
A vibration model of Besocke-style scanners is given based on Timoshenko beam theory. The model is applied to investigate the flexural vibration characteristics of piezotubes in the scanners, in which the effects of affiliated components of the piezo-tubes are considered. The calculated results show that several factors in addition to the piezo-tubes themselves influence the flexural vibration frequencies of the scanners. An example is the balls which support the piezo-tubes. These play important roles in influencing the flexural vibration characteristics of the scanners and can result in high-flexural resonance frequencies. The local resonance of the scanner disk can also influence the flexural vibration characteristics of the piezo-tubes. Finally, we show that the effects of the local resonance on the vibration characteristics of the scanners can be decreased or eliminated by improving the rigidity of connection between the scanner disk and the piezo-tube.
Keywords
piezoelectric devices; scanning probe microscopy; shear modulus; vibrations; Besocke-style scanners; Besocke-style scanning systems; Timoshenko beam theory; flexural vibration characteristics; flexural vibration frequencies; high-flexural resonance frequencies; piezotubes; rigidity; vibration model; Resonance; Resonant frequency;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2010.1525
Filename
5456262
Link To Document