DocumentCode
1482256
Title
Cost-effective fabrication of nanoscale electrode memristors with reproducible electrical response
Author
Michelakis, K. ; Prodromakis, Themistoklis ; Toumazou, Christofer
Author_Institution
Inst. of Biomed. Eng., Imperial Coll. London, London, UK
Volume
5
Issue
2
fYear
2010
fDate
4/1/2010 12:00:00 AM
Firstpage
91
Lastpage
94
Abstract
This Letter aims to promote basic research into memristors, which will help provide theorists with much-needed reliable benchmarks and will also aid the technology progress. It addresses an information gap presently in the literature on simple microfabrication techniques for the realisation of such devices. Consequently, a fabrication method is reported for implementing the full active-material stack, requiring a single lithography and evaporation step. A cost-effective technique that can reliably shrink device lateral dimensions towards the nanoscale is also demonstrated. Experimental results confirm the suitability of the proposed methods for fabricating memristors of varying dimensions that exhibit consistent electrical characteristics.
Keywords
electrodes; evaporation; lithography; memristors; microfabrication; nanoelectromechanical devices; nanolithography; electrical characteristics; electrical response; evaporation; lateral dimensions; microfabrication; nanoscale electrode memristors; single lithography;
fLanguage
English
Journal_Title
Micro & Nano Letters, IET
Publisher
iet
ISSN
1750-0443
Type
jour
DOI
10.1049/mnl.2009.0106
Filename
5457356
Link To Document