Title :
Batch fabricated long throw bi-stable electromagnetic micro-actuator
Author :
Dai, X.H. ; Ding, Guoru ; Zhao, X.L.
Author_Institution :
State Key Lab. of Micro/Nano Fabrication Technol., Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
A long throw bi-stable electromagnetic micro-actuator is presented. Its configuration was easy to be batch fabricated. According to the experiment results, when the actuator was applied with a 5 V voltage pulse, the bi-stable switch was realised and the output displacement was larger than 150 m. Its overall size is 6 ?? 6 ?? 3 mm. The device structure, principle and fabrication method are also presented.
Keywords :
electromagnetic actuators; microactuators; microfabrication; microswitches; batch fabricated microactuator; bistable switch; fabrication method; long throw bistable electromagnetic microactuator; voltage 5 V;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2010.2109
