Title :
Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators
Author :
Giner, Joan ; Uranga, A. ; Torres, F. ; Marigo, E. ; Barniol, N.
Author_Institution :
Electron. Eng. Dept., Univ. Autonoma de Barcelona, Bellaterra, Spain
Abstract :
The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5% frequency bandwidth in a tunable 26% MHz bandpass filter with a very low bandpass distortion (less than 0.1% dB), which makes the filter suitable for wireless super-hetherodyne transceivers in communications standards such as GSM.
Keywords :
CMOS analogue integrated circuits; band-pass filters; micromechanical resonators; transceivers; CMOS integrated bandpass filter; GSM; RF MEMS resonators; frequency bandwidth; frequency channel selection MEMS filter; mechanical coupling; very low bandpass distortion; wireless superhetherodyne transceivers;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2010.0505
