DocumentCode
1483086
Title
Novel Capacitive Pressure Sensor
Author
Bakhoum, Ezzat G. ; Cheng, Marvin H M
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of West Florida, Pensacola, FL, USA
Volume
19
Issue
3
fYear
2010
fDate
6/1/2010 12:00:00 AM
Firstpage
443
Lastpage
450
Abstract
A new microelectromechanical-systems capacitive pressure sensor with extremely high sensitivity (2.24 ??F/kPa) is introduced. The sensor essentially consists of a small drop of mercury and a flat aluminum electrode that are separated by a 1 ??m-thick layer of Barium Strontium Titanate (a high dielectric-constant ceramic). The assembly constitutes a parallel-plate capacitor where the surface area of the electrodes is variable to a high degree. The mercury drop is pressured by a small corrugated metal diaphragm. As the electrode area of the parallel-plate capacitor varies, a total change in capacitance of more than 6 ??F is obtained.
Keywords
barium compounds; capacitance; capacitive sensors; electrodes; micromechanical devices; pressure sensors; Barium Strontium Titanate; capacitance change; corrugated metal diaphragm; electrodes surface area; flat aluminum electrode; mercury drop; microelectromechanical systems; parallel-plate capacitor; parallel-plate capacitor pressure sensor; size 1 mum; Capacitive pressure sensors; sensors;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2010.2047632
Filename
5457970
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