Impact of surrounding gate transistor (SGT) for ultra-high-density LSI´s

A transistor with compact structures for future MOS devices is discussed. This transistor, whose gate electrode surrounds the pillar silicon island, reduces the occupied area for all kinds of circuits. By using this transistor, the occupied area of the CMOS inverter can be shrunk to 50% of that using planar transistors. Other advantages, such as steep cutoff characteristics, very small substrate bias effects, and high reliability, are discussed. Its structure, which allows for the enlargement of gate-controllability to the channel and electric field relaxation at the drain edge, is described. The advantages of this SGT for large-scale integration (LSI) devices is discussed