Bulk acoustic wave sensors for sensing measurand-induced electrical property changes in solutions

Author

Zhang, Chao ; Vetelino, John F.

Author_Institution

Lab. for Surface Sci. & Technol., Maine Univ., Orono, ME, USA

Volume

48

Issue

3

fYear

2001

fDate

5/1/2001 12:00:00 AM

Firstpage

773

Lastpage

778

Abstract

A variety of quartz thickness shear mode (TSM) resonant sensors with different electrode configurations have been designed, fabricated, and tested in liquids for probing liquid electrical property changes. The resonant frequency of the sensors was found to have more than an order of magnitude increase in sensitivity over the standard AT-cut quartz resonant sensor. The increase in sensitivity is due to the ability of the sensors to detect changes in the electrical properties in the liquid.

Keywords

acoustic resonators; bulk acoustic wave devices; electrodes; nonelectric sensing devices; bulk acoustic wave sensors; electrode configurations; liquid electrical property changes; measurand-induced electrical property changes; resonant frequency; thickness shear mode resonant sensors; Acoustic measurements; Acoustic sensors; Acoustic waves; Chemical and biological sensors; Electric variables measurement; Electrodes; Liquids; Mechanical factors; Mechanical sensors; Resonant frequency;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.920710

Filename

920710