• DocumentCode
    1484073
  • Title

    Lateral resonant tunneling transistors employing field-induced quantum wells and barriers

  • Author

    Chou, Stephen Y. ; Allee, David R. ; Pease, R. Fabian ; Harris, James S., Jr.

  • Author_Institution
    Stanford Univ., CA, USA
  • Volume
    79
  • Issue
    8
  • fYear
    1991
  • fDate
    8/1/1991 12:00:00 AM
  • Firstpage
    1131
  • Lastpage
    1139
  • Abstract
    The authors describe some preliminary experimental results of quantum-effect modulation-doped field-effect transistors (MODFETs) with a variety of nanometer gate geometries. The gate geometries were such that various quantum wells and barriers were formed in the channel of the MODFETs through the field effect imposed by the novel gate structures, and the transport of the electrons was affected by resonant tunneling. The devices were fabricated using a combination of molecular beam epitaxy and electron beam lithography. Electrical measurements of the devices at 4.2 K showed resonant tunneling effects and, in particular, showed that resonant tunneling is more pronounced for a system of quantum wells confined in three dimensions than in two. For these quantum effects to be appreciable at practical temperatures, about 77 K, the feature size of the gate geometries should be smaller than 50 nm
  • Keywords
    electron beam lithography; high electron mobility transistors; molecular beam epitaxial growth; quantum interference devices; resonant tunnelling devices; semiconductor quantum wells; 4.2 K; 50 nm; 77 K; MODFETs; electron beam lithography; field-effect transistors; field-induced quantum wells; lateral resonant tunnelling transistors; modulation-doped; molecular beam epitaxy; nanometer gate geometries; quantum-effect; Electric variables measurement; Electron beams; Epitaxial layers; FETs; Geometry; HEMTs; Lithography; MODFETs; Molecular beam epitaxial growth; Resonant tunneling devices;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/5.92072
  • Filename
    92072