DocumentCode
1484073
Title
Lateral resonant tunneling transistors employing field-induced quantum wells and barriers
Author
Chou, Stephen Y. ; Allee, David R. ; Pease, R. Fabian ; Harris, James S., Jr.
Author_Institution
Stanford Univ., CA, USA
Volume
79
Issue
8
fYear
1991
fDate
8/1/1991 12:00:00 AM
Firstpage
1131
Lastpage
1139
Abstract
The authors describe some preliminary experimental results of quantum-effect modulation-doped field-effect transistors (MODFETs) with a variety of nanometer gate geometries. The gate geometries were such that various quantum wells and barriers were formed in the channel of the MODFETs through the field effect imposed by the novel gate structures, and the transport of the electrons was affected by resonant tunneling. The devices were fabricated using a combination of molecular beam epitaxy and electron beam lithography. Electrical measurements of the devices at 4.2 K showed resonant tunneling effects and, in particular, showed that resonant tunneling is more pronounced for a system of quantum wells confined in three dimensions than in two. For these quantum effects to be appreciable at practical temperatures, about 77 K, the feature size of the gate geometries should be smaller than 50 nm
Keywords
electron beam lithography; high electron mobility transistors; molecular beam epitaxial growth; quantum interference devices; resonant tunnelling devices; semiconductor quantum wells; 4.2 K; 50 nm; 77 K; MODFETs; electron beam lithography; field-effect transistors; field-induced quantum wells; lateral resonant tunnelling transistors; modulation-doped; molecular beam epitaxy; nanometer gate geometries; quantum-effect; Electric variables measurement; Electron beams; Epitaxial layers; FETs; Geometry; HEMTs; Lithography; MODFETs; Molecular beam epitaxial growth; Resonant tunneling devices;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/5.92072
Filename
92072
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