Nanostructure fabrication

Quantum transport effects have been explored in semiconductors using a two-dimensional electron gas confined by lateral nanostructures. Once the lateral sizes and the layer thickness are reduced to be smaller than the phase coherence length of the electrons in the material, quantum effects become pronounced; it is this aspect of nanofabrication that is considered. The structures defined by a number of different methods are considered and the techniques required to make them are described. Special electron beam lithography systems and processes and a range of focused ion beam techniques and processing methods designed specifically for nanofabrication are discussed. After defining the types of structures used to investigate the physics, the physical phenomena explored with them are considered briefly