A novel integrated micromachined tunable laser using polysilicon 3-D mirror

Author

Liu, A.Q. ; Zhang, X.M. ; Murukeshan, V.M. ; Lam, Y.L.

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore

Volume

13

Issue

5

fYear

2001

fDate

5/1/2001 12:00:00 AM

Firstpage

427

Lastpage

429

Abstract

A prototype tunable laser of /spl sim/2 mm/spl times/1.5 mm size has been developed for wavelength-division-multiplexing (WDM) application. This device is an integrated micromachined polysilicon three-dimensional (3-D) mirror with a single-mode Fabry-Perot laser diode and an antireflection-coated optical fiber. The micromirror can be driven to move laterally by an electrostatic comb-drive that changes the external cavity length of laser diode enabling wavelength tuning. A wavelength-tunable range of 16 nm is obtained using a driving voltage within /spl plusmn/3 V at a bias voltage of 10 V.

Keywords

Fabry-Perot resonators; antireflection coatings; electro-optical devices; integrated optics; laser cavity resonators; laser mirrors; laser modes; laser tuning; micro-optics; micromachining; semiconductor lasers; silicon; wavelength division multiplexing; 1.5 mm; 10 V; 2 mm; Si; antireflection-coated optical fiber; bias voltage; driving voltage; electrostatic comb-drive; external cavity length; integrated micromachined polysilicon three-dimensional mirror; integrated micromachined tunable laser; micromirror; polysilicon 3-D mirror; single-mode Fabry-Perot laser diode; wavelength tuning; wavelength-division-multiplexing; wavelength-tunable range; Diode lasers; Fabry-Perot; Fiber lasers; Micromirrors; Mirrors; Optical fibers; Prototypes; Tunable circuits and devices; Voltage; Wavelength division multiplexing;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.920739

Filename

920739