DocumentCode
1484408
Title
Introduction to the Special Section on Advanced Process Control
Author
Moyne, James ; Patel, Nital S.
Author_Institution
Applied Materials Inc., Canton, MI, USA
Volume
23
Issue
2
fYear
2010
fDate
5/1/2010 12:00:00 AM
Firstpage
149
Lastpage
150
Abstract
The nine papers selected for the current special section reflect the continued maturation of advanced process control (APC) research and its movement into new application and technology areas.
Keywords
Control systems; Fault detection; Metrology; Optimization methods; Process control; Productivity; Sampling methods; Semiconductor process modeling; Size control; Special issues and sections;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2010.2046115
Filename
5458323
Link To Document