Title :
Improvement of micromagnetism of Ni-Fe/Co67Cr33 multilayers for backlayers of perpendicular magnetic recording media
Author :
Ichihara, Takayuki ; Nakagawa, Shigeki ; Matsumiya, Hiroaki ; Naoe, Masahiko
Author_Institution :
Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan
fDate :
9/1/1997 12:00:00 AM
Abstract :
The multilayers composed of soft magnetic Ni79Fe21 layers and very thin paramagnetic Co67Cr33 layers were deposited using the facing targets sputtering (FTS) apparatus. When the external field Hext of 100 Oe transverse to the direction of the plasma confining field Hp of about 20 Oe in the FTS apparatus was applied during layer deposition, the soft magnetic characteristics for the [Ni79Fe21/Co67Cr33]2 multilayers were improved. Furthermore, the relative permeability μr of the multilayers was extremely and isotropically increased especially when the multilayers were deposited at extremely low Ar pressure PAr of 0.4 mTorr
Keywords :
chromium alloys; cobalt alloys; iron alloys; magnetic multilayers; magnetic permeability; nickel alloys; perpendicular magnetic recording; soft magnetic materials; sputtered coatings; Ni-Fe/Co67Cr33 multilayer; Ni79Fe21-Co67Cr33; backlayer; facing targets sputtering; micromagnetism; paramagnetic layer; perpendicular magnetic recording; plasma confining field; relative permeability; soft magnetic layer; Argon; Chromium; Iron; Magnetic confinement; Magnetic multilayers; Paramagnetic materials; Plasma confinement; Plasma properties; Soft magnetic materials; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
