Title :
MR head response from arrays of lithographically patterned perpendicular nickel columns
Author :
Yamamoto, S.Y. ; O´Barr, R. ; Schultz, S. ; Scherer, A.
Author_Institution :
Center for Magnetic Recording Res., California Univ., San Diego, La Jolla, CA, USA
fDate :
9/1/1997 12:00:00 AM
Abstract :
We report, for the first time, the MR head response from lithographically patterned perpendicular nickel columns. Electron-beam lithography is used to fabricate arrays of Ni columns, 400 nm tall and 150 nm in diameter spaced 2.1 μm apart, embedded in SiO2. The sample surface is planarized with a chemical mechanical polish. The technique of Scanning Magnetoresistance Microscopy (SMRM), in which a magnetoresistive (MR) head is raster-scanned in contact with a sample, is used to investigate the MR head response from the Ni columns. Single columns can be “read” with a 0-peak MR voltage of 60-70 μV. Unexpectedly, we find that the magnetic field due to the bias current in the MR head is enough to switch the columns during scanning, which results in a “dibit-like” MR response, By scanning in the presence of a small (~21 Oe) external magnetic bias field, the columns can be imaged in either their “up” or “down” magnetic states
Keywords :
electron beam lithography; ferromagnetic materials; magnetic heads; magnetic particles; magnetoresistive devices; nickel; perpendicular magnetic recording; polishing; 150 nm; 2.1 micron; 400 nm; 60 to 70 muV; MR head response; Ni; bias current; chemical mechanical polish; dibit-like MR response; electron-beam lithography; lithographically patterned perpendicular columns; magnetic field; magnetic particles; scanning magnetoresistance microscopy; Contacts; Lithography; Magnetic fields; Magnetic force microscopy; Magnetic heads; Magnetoresistance; Nickel; Planarization; Switches; Voltage;
Journal_Title :
Magnetics, IEEE Transactions on