Title :
MEMS: micro technology, mega impact
Author :
Nagel, David J. ; Zaghloul, Mona E.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., George Washington Univ., Washington, DC, USA
fDate :
3/1/2001 12:00:00 AM
Abstract :
The variety and applications of microelectromechanical systems (MEMS) devices have increased dramatically, improving existing uses or enabling entirely new ones. This article surveys some of the current and projected applications of MEMS
Keywords :
micromechanical devices; microelectromechanical systems; Biomedical equipment; Ink jet printing; Medical services; Microelectromechanical devices; Microelectromechanical systems; Microelectronics; Micromechanical devices; Optical fiber networks; Production; Space technology;
Journal_Title :
Circuits and Devices Magazine, IEEE
