DocumentCode

1485392

Title

Selective Mode Excitation And Detection Of Micromachined Resonators

Author

Prak, Albert ; Elwenspoek, Miko ; Fluitman, Jan H J

Author_Institution

University of Twente

Volume

1

Issue

4

fYear

1992

fDate

12/1/1992 12:00:00 AM

Firstpage

179

Lastpage

186

Keywords

Bridge circuits; Capacitive sensors; Electrodes; Mechanical systems; Oscillators; Resonance; Shape control; Strain measurement; Stress; Vibrations;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.1992.752509

Filename

752509