Title :
An Etch-stop Utilizing Selective Etching Of N-type Silicon By Pulsed Potential Anodization
Author :
Wang, Simon S. ; McNeil, Vincent M. ; Schmidt, Martin A.
Author_Institution :
General Motors Research Laboratories
fDate :
12/1/1992 12:00:00 AM
Keywords :
Biomembranes; Diodes; Electrodes; Etching; Laboratories; Leakage current; Microstructure; P-n junctions; Silicon; Voltage;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.1992.752510
