DocumentCode

1485410

Title

A Microstructure For Measurement Of Thermal Conductivity Of Polysilicon Thin Films

Author

Völklein, Friedemann ; Balles, H.

Author_Institution

Quantum Electronics

Volume

1

Issue

4

fYear

1992

fDate

12/1/1992 12:00:00 AM

Firstpage

193

Lastpage

196

Keywords

CMOS integrated circuits; CMOS process; CMOS technology; Conductive films; Conductivity measurement; Etching; Microstructure; Silicon; Thermal conductivity; Transistors;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.1992.752511

Filename

752511