Title :
Silicon Crystal Growth and Wafer Technologies
Author :
Fisher, Graham ; Seacrist, Michael R. ; Standley, Robert W.
Author_Institution :
MEMC Electron. Mater. Inc., St. Peters, MO, USA
Abstract :
Silicon substrates form the foundation of modern microelectronics. Whereas the first 50 years of silicon wafer technology were primarily driven by the microelectronics industry, applications in photovoltaics (PV) also promise to drive new advances in silicon wafer technology over the next ten years. In the first part, we review the historical development of semiconductor silicon wafer technology and highlight recent technical advances in bulk crystal growth and wafering technologies, including the development of silicon-on-insulator (SOI) technologies and ultrathin wafers. We then discuss technologies that could take us beyond the current capabilities of complementary metal-oxide-semiconductor (CMOS) devices. In the second part, we review silicon manufacturing for PV applications and some unique wafering technology challenges in that field. Finally, we summarize industry roadmaps and product needs highlighting key technical areas which promise to shape the future of silicon wafer technologies in the coming decades.
Keywords :
CMOS integrated circuits; crystal growth; elemental semiconductors; silicon; solar cells; CMOS devices; SOI technology; Si; complementary metal-oxide-semiconductor devices; microelectronics industry; photovoltaic cells; semiconductor silicon wafer technology; silicon crystal growth; silicon manufacturing; silicon-on-insulator; ultrathin wafers; Crystals; Large scale integration; Photovoltaic systems; Semiconductor device measurement; Silicon; Substrates; Transistors; Wafer scale integration; Photovoltaics (PV); semiconductor materials; silicon; substrates;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/JPROC.2012.2189786