Title :
Ion-implanted integrated optical waveguides in lithium niobate
Author :
Naden, J.M. ; Weiss, B.L.
fDate :
5/1/1984 12:00:00 AM
Abstract :
The role of ion implantation in the fabrication of optical waveguides in lithium niobate is describedtogether with a review of work carried out in this field. In addition the waveguide structure and the process parameters which determine its characteristics are outlined. Finally, the implications of this technology forthe fabrication of more complex integrated optical devices are discussed.
Keywords :
ferroelectric materials; integrated optics; ion implantation; optical waveguides; optical workshop techniques; LiNbO3; fabrication; ferroelectric material; integrated optical waveguides; ion implantation; process;
Journal_Title :
Radio and Electronic Engineer
DOI :
10.1049/ree.1984.0056