DocumentCode :
1485902
Title :
Ion-implanted integrated optical waveguides in lithium niobate
Author :
Naden, J.M. ; Weiss, B.L.
Volume :
54
Issue :
5
fYear :
1984
fDate :
5/1/1984 12:00:00 AM
Firstpage :
227
Lastpage :
230
Abstract :
The role of ion implantation in the fabrication of optical waveguides in lithium niobate is describedtogether with a review of work carried out in this field. In addition the waveguide structure and the process parameters which determine its characteristics are outlined. Finally, the implications of this technology forthe fabrication of more complex integrated optical devices are discussed.
Keywords :
ferroelectric materials; integrated optics; ion implantation; optical waveguides; optical workshop techniques; LiNbO3; fabrication; ferroelectric material; integrated optical waveguides; ion implantation; process;
fLanguage :
English
Journal_Title :
Radio and Electronic Engineer
Publisher :
iet
ISSN :
0033-7722
Type :
jour
DOI :
10.1049/ree.1984.0056
Filename :
5269668
Link To Document :
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