Title :
Ferrite-based integrated planar inductors and transformers fabricated at low temperature
Author :
Park, Jae Y. ; Lagorce, Laure K. ; Allen, Mark G.
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fDate :
9/1/1997 12:00:00 AM
Abstract :
Fully integrated microinductors and microtransformers based on two different geometries and ferrite composite materials are designed, fabricated, tested, and compared. These devices are based on screen printed polymer/ferrite composites and electroplated copper coils, and are deposited at low temperature, making them compatible with organic electronic packaging substrates
Keywords :
composite materials; ferrite devices; inductors; magnetic cores; transformer cores; electroplated copper coil; integrated planar inductor; integrated planar transformer; low temperature fabrication; microinductor; microtransformer; organic electronic packaging substrate; screen printed polymer/ferrite composite material; Coils; Composite materials; Copper; Ferrites; Geometry; Inductors; Materials testing; Polymers; Temperature; Transformers;
Journal_Title :
Magnetics, IEEE Transactions on