• DocumentCode
    1487210
  • Title

    Influence of target production techniques on target properties, sputtering process and thin films for magnetooptics

  • Author

    Schittny, S.U. ; Berchtold, L.A. ; Böhm, W. ; Schultheiss, E. ; Wirz, P.

  • Author_Institution
    Degussa AG, Hanau, West Germany
  • Volume
    24
  • Issue
    6
  • fYear
    1988
  • fDate
    11/1/1988 12:00:00 AM
  • Firstpage
    2769
  • Lastpage
    2771
  • Abstract
    Different production techniques for the fabrication of rare-earth/transition-metal sputtering targets based on FeCoGdTb and target tests for the preparation of magnetooptical thin films have been investigated. Correlations between target production techniques and resulting target properties as well as some effects on the thin films and the sputtering process are described
  • Keywords
    cadmium compounds; cobalt compounds; iron compounds; optical films; optical workshop techniques; sputter deposition; sputtered coatings; terbium compounds; FeCoGdTb; fabrication; magnetooptical thin films; rare-earth/transition-metal sputtering targets; sputtering process; target production techniques; target properties; Amorphous magnetic materials; Composite materials; Fabrication; Inorganic materials; Magnetic materials; Magnetic properties; Magnetooptic recording; Powders; Production; Sputtering;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.92240
  • Filename
    92240
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1487210