Title :
Effects of target structure on the properties of MO recoding media produced in a large-scale vertical in-line sputtering system
Author :
Schultheisß, E. ; Brauer, G. ; Wirz, P. ; Schittny, St U. ; Berchtold, L.A. ; Shieh, H.P.D.
Author_Institution :
Leybold AG, Hanau, West Germany
fDate :
11/1/1988 12:00:00 AM
Abstract :
The metallurgical states of rare-earth-transition-metal targets were found to have a significant effect on the performance of magnetooptical (MO) recording thin films. Polar Kerr MO hysteresis loops of the films were measured as a function of temperature at a HeNe laser wavelength. B-H hysteresis loops were measured by a vibrating sample magnetometer at the room temperature. The study indicates that in a vertical in-line sputtering system, a rectangular alloy target containing about 25% of the intermetallic phase produces a negligibly small composition gradient in DC-magnetron-sputtered films. With a proper aperture to mask off oblique incident coating flux, coercivity and thickness variations of less than ±5 and ±2% have been achieved reproducibly on 5.25-in disks
Keywords :
Kerr magneto-optical effect; cobalt alloys; coercive force; ferrimagnetic properties of substances; iron alloys; magnetic hysteresis; magnetic properties of amorphous substances; magnetic thin films; magneto-optical recording; sputtered coatings; terbium alloys; B-H hysteresis loops; DC-magnetron-sputtered films; TbFeCo alloy targets; coercivity variation; large-scale vertical in-line sputtering system; magnetooptical recording thin films; polar Kerr magnetooptical hysteresis loops; rare-earth-transition-metal targets; rectangular alloy target; target structure; thickness variations; vibrating sample magnetometer; Hysteresis; Intermetallic; Magnetometers; Magnetooptic effects; Magnetooptic recording; Sputtering; Temperature; Transistors; Vibration measurement; Wavelength measurement;
Journal_Title :
Magnetics, IEEE Transactions on