• DocumentCode
    148791
  • Title

    A microfluidic interposer based on three dimensional molded substrate technology

  • Author

    Leneke, T. ; Majcherek, S. ; Hirsch, S. ; Schmidt, M.-P. ; Schmidt, Benedikt

  • Author_Institution
    Packaging Div., Otto-von-Guericke-Univ. Magdeburg, Magdeburg, Germany
  • fYear
    2014
  • fDate
    23-25 April 2014
  • Firstpage
    223
  • Lastpage
    226
  • Abstract
    Three dimensional molded interconnect devices (MID) with fluidic features offer new possibilities for the packaging of microfluidic components. This paper reports about an MID based fluidic interposer to bridge the micro-macro gap of fluid delivery in microfluidic systems. The interposer is fabricated by standard MID fabrication technology and includes a metallization for electrical signals and channel structures for fluidic functions. A microfluidic test chip is assembled to the interposer by a flip-chip process. The proposed interposer is suitable for pressure and capillary driven flows. Results from pressurization testing with liquids and gases are given.
  • Keywords
    flip-chip devices; metallisation; microfluidics; flip-chip process; metallization; microfluidic components; microfluidic interposer; microfluidic test chip; molded interconnect devices; three dimensional molded substrate technology; Assembly; Fabrication; Fluids; Metallization; Microfluidics; Packaging; Silicon; flip-chip; fluidic interposer; microfluidic packaging; molded interconnect device;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Packaging (ICEP), 2014 International Conference on
  • Conference_Location
    Toyama
  • Print_ISBN
    978-4-904090-10-7
  • Type

    conf

  • DOI
    10.1109/ICEP.2014.6826693
  • Filename
    6826693