DocumentCode
148791
Title
A microfluidic interposer based on three dimensional molded substrate technology
Author
Leneke, T. ; Majcherek, S. ; Hirsch, S. ; Schmidt, M.-P. ; Schmidt, Benedikt
Author_Institution
Packaging Div., Otto-von-Guericke-Univ. Magdeburg, Magdeburg, Germany
fYear
2014
fDate
23-25 April 2014
Firstpage
223
Lastpage
226
Abstract
Three dimensional molded interconnect devices (MID) with fluidic features offer new possibilities for the packaging of microfluidic components. This paper reports about an MID based fluidic interposer to bridge the micro-macro gap of fluid delivery in microfluidic systems. The interposer is fabricated by standard MID fabrication technology and includes a metallization for electrical signals and channel structures for fluidic functions. A microfluidic test chip is assembled to the interposer by a flip-chip process. The proposed interposer is suitable for pressure and capillary driven flows. Results from pressurization testing with liquids and gases are given.
Keywords
flip-chip devices; metallisation; microfluidics; flip-chip process; metallization; microfluidic components; microfluidic interposer; microfluidic test chip; molded interconnect devices; three dimensional molded substrate technology; Assembly; Fabrication; Fluids; Metallization; Microfluidics; Packaging; Silicon; flip-chip; fluidic interposer; microfluidic packaging; molded interconnect device;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Packaging (ICEP), 2014 International Conference on
Conference_Location
Toyama
Print_ISBN
978-4-904090-10-7
Type
conf
DOI
10.1109/ICEP.2014.6826693
Filename
6826693
Link To Document