DocumentCode
1487994
Title
Propagation of longitudinal leaky surface waves under periodic SiO/sub 2//Al structure on Li/sub 2/B/sub 4/O/sub 7/ substrate
Author
Sato, Takahiro ; Ohkubo, Yukio ; Abe, Hidenori
Author_Institution
Kinseki Ltd., Tokyo, Japan
Volume
46
Issue
2
fYear
1999
fDate
3/1/1999 12:00:00 AM
Firstpage
383
Lastpage
391
Abstract
The properties of longitudinal leaky surface waves (LLSW) under a periodic SiO/sub 2//Al structure on Li/sub 2/B/sub 4/O/sub 7/ (LBO) substrate, were investigated theoretically and experimentally, in order to improve the high propagation losses of LLSWs under a periodic Al grating with the normalized thickness over 2%. In the theoretical analysis, the previously presented method based on the boundary integral equations for the periodic metal grating structure on the substrate was extended to include the dielectric layer. In the experiments, devices with Al electrodes recessed into a SiO/sub 2/ groove on LBO were fabricated, and the propagation losses of them were estimated. As a result, it was shown that, when the surface of the structure was flattened, the propagation losses were sufficiently low and the first Bragg stopband width decreased.
Keywords
aluminium; boundary integral equations; lithium compounds; periodic structures; silicon compounds; surface acoustic wave devices; Al electrode; Bragg stopband; LBO substrate; Li/sub 2/B/sub 4/O/sub 7/; SiO/sub 2/ groove; SiO/sub 2/-Al; boundary integral equation; dielectric layer; longitudinal leaky surface wave; metal grating; periodic structure; propagation loss; Dielectric substrates; Electric resistance; Electrodes; Gratings; Periodic structures; Propagation losses; Strips; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.753027
Filename
753027
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