• DocumentCode
    1487994
  • Title

    Propagation of longitudinal leaky surface waves under periodic SiO/sub 2//Al structure on Li/sub 2/B/sub 4/O/sub 7/ substrate

  • Author

    Sato, Takahiro ; Ohkubo, Yukio ; Abe, Hidenori

  • Author_Institution
    Kinseki Ltd., Tokyo, Japan
  • Volume
    46
  • Issue
    2
  • fYear
    1999
  • fDate
    3/1/1999 12:00:00 AM
  • Firstpage
    383
  • Lastpage
    391
  • Abstract
    The properties of longitudinal leaky surface waves (LLSW) under a periodic SiO/sub 2//Al structure on Li/sub 2/B/sub 4/O/sub 7/ (LBO) substrate, were investigated theoretically and experimentally, in order to improve the high propagation losses of LLSWs under a periodic Al grating with the normalized thickness over 2%. In the theoretical analysis, the previously presented method based on the boundary integral equations for the periodic metal grating structure on the substrate was extended to include the dielectric layer. In the experiments, devices with Al electrodes recessed into a SiO/sub 2/ groove on LBO were fabricated, and the propagation losses of them were estimated. As a result, it was shown that, when the surface of the structure was flattened, the propagation losses were sufficiently low and the first Bragg stopband width decreased.
  • Keywords
    aluminium; boundary integral equations; lithium compounds; periodic structures; silicon compounds; surface acoustic wave devices; Al electrode; Bragg stopband; LBO substrate; Li/sub 2/B/sub 4/O/sub 7/; SiO/sub 2/ groove; SiO/sub 2/-Al; boundary integral equation; dielectric layer; longitudinal leaky surface wave; metal grating; periodic structure; propagation loss; Dielectric substrates; Electric resistance; Electrodes; Gratings; Periodic structures; Propagation losses; Strips; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.753027
  • Filename
    753027