Title :
A Hall effect microsensor for micromechanical device characterization
Author :
Grande, William J. ; Reznik, Svetlana ; Ertel, Joy
Author_Institution :
Eastman Kodak Co., Rochester, NY, USA
fDate :
9/1/1997 12:00:00 AM
Abstract :
A Hall Effect microsensor has been fabricated to provide high field, high spatial resolution characterization of magnetically based micromechanical devices. The active sensor material was bismuth deposited on a dielectric-coated silicon substrate. The use of silicon as the substrate was observed to convey a number of performance and fabrication advantages
Keywords :
Hall effect transducers; magnetic sensors; micromechanical devices; microsensors; Bi-Si; Hall effect microsensor; bismuth film; dielectric-coated silicon substrate; magnetic micromechanical device; Dielectric materials; Dielectric substrates; Hall effect; Magnetic devices; Magnetic sensors; Micromechanical devices; Microsensors; Sensor phenomena and characterization; Silicon; Spatial resolution;
Journal_Title :
Magnetics, IEEE Transactions on
