Title :
In-situ measurement of permeability during rotational magnetic annealing of CoZrNb
Author :
Yip, Y. ; Vos, M.J. ; Lu, M. ; Dugas, M.P. ; Judy, J.H.
Author_Institution :
Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA
fDate :
11/1/1988 12:00:00 AM
Abstract :
A method has been developed to monitor the change in initial permeability while a sample is being annealed in a rotating magnetic field. RF-sputtered thin films of CoZrNb were placed within a sensing coil that can withstand high temperatures. The self-inductance of the coil was monitored during annealing. The inductance of the coil is a function of the sample permeability. The change in initial permeability as a function of annealing temperature time, and sample deposition conditions was investigated. It was found that there is a range of critical temperatures in which the permeability of the sample increased rapidly, which depends on the deposition temperature of the thin film
Keywords :
cobalt alloys; ferromagnetic properties of substances; magnetic annealing; magnetic permeability; magnetic permeability measurement; magnetic thin films; niobium alloys; sputtered coatings; zirconium alloys; CoZrNb; RF-sputtered thin films; deposition temperature; in situ measurement; permeability; rotational magnetic annealing; self-inductance; sensing coil; Annealing; Coils; Magnetic field measurement; Monitoring; Permeability measurement; Rotation measurement; Temperature dependence; Temperature distribution; Temperature sensors; Transistors;
Journal_Title :
Magnetics, IEEE Transactions on
